Traditional LED yakashandura nzvimbo yekuvhenekesa uye kuratidza nekuda kwekuita kwavo kwepamusoro maererano nekushanda, kugadzikana uye saizi yemuchina.MaLED anowanzo mhata yemafirimu matete semiconductor ane lateral dimensions yemamirimita, madiki kwazvo pane echinyakare michina yakaita semabarabhu eincandescent uye machubhu ecathode.Nekudaro, ari kubuda optoelectronic application, senge chaiyo uye yakawedzera chokwadi, inoda maLED muhukuru hwemamicrons kana mashoma.Tariro ndeyokuti micro - kana submicron scale LED (µleds) inoramba iine humwe humwe hunhu hwepamusoro hwakagara huripo, hwakadai sekubudisa kwakadzikama, kushanda kwepamusoro uye kupenya, kushandiswa kwemagetsi ekupedzisira-pasi, uye kubudiswa kwemavara akazara, nepo ichive idiki zvakapetwa kamiriyoni munzvimbo, ichibvumira mamwe compact kuratidza.Machipisi anotungamirwa akadaro anogona zvakare kuvhura nzira kune ane simba mafotonic maseketi kana achikwanisa kukura imwe-chip paSi uye akabatanidzwa neanokwana simbi oxide semiconductor (CMOS) zvemagetsi.
Nekudaro, kusvika pari zvino, ma µleds akadaro aramba asinganzwisisike, kunyanya mugirinhi kusvika kutsvuku emission wavelength renji.Iyo yechinyakare inotungamirwa µ-inotungamirwa maitiro inzira yekumusoro-pasi umo InGaN quantum zvakanaka (QW) mafirimu anoiswa mumidziyo midiki-diki kuburikidza ne etching maitiro.Nepo firimu rakatetepa reInGaN QW-based tio2 µleds rakakwezva kutariswa kwakawanda nekuda kweakawanda ezvakanakisa zveInGaN, senge yakanyatso kutakura mutakuri uye wavelength tunability munzvimbo yese inooneka, kusvika parizvino vanga vachinetswa nenyaya dzakadai semadziro-madziro. kukuvara kwecorrosion kunowedzera sezvo saizi yemudziyo inoderera.Mukuwedzera, nekuda kwekuvapo kwepolarization minda, vane wavelength / kusagadzikana kwemavara.Nekuda kwedambudziko iri, isiri-polar uye semi-polar InGaN uye photonic crystal cavity mhinduro dzakarongwa, asi hadzina kugutsa parizvino.
Mune bepa idzva rakabudiswa muChiedza Sayenzi uye Zvishandiso, vaongorori vanotungamirwa naZetian Mi, purofesa paYunivhesiti yeMichigan, Annabel, vakagadzira submicron scale green LED iii - nitride inokunda zvipingamupinyi izvi zvachose.Aya ma µleds akagadzirwa neakasarudzika edunhu plasma-akabatsira molecular beam epitaxy.Mukupesana zvakanyanya nemaitiro echinyakare kubva kumusoro-pasi, iyo µled pano ine ruzhinji rwe nanowires, imwe neimwe chete 100 kusvika 200 nm mudhayamita, yakaparadzaniswa nemakumi emananomita.Iyi nzira yepasi-kumusoro inodzivirira lateral wall corrosion kukuvara.
Chikamu chinobudisa chiedza chemudziyo, chinozivikanwawo senzvimbo inoshanda, inoumbwa ne-core-shell multiple quantum well (MQW) zvimiro zvinoratidzwa nanowire morphology.Kunyanya, iyo MQW ine InGaN tsime uye AlGaN barriers.Nekuda kwekusiyana kwekufamba kweatomu adsorbed yeBoka III zvinhu indium, gallium nealuminium pamadziro emadziro, takaona kuti indium yakanga isipo pamadziro emadziro e nanowires, uko GaN/AlGaN goko rakaputira MQW musimboti seburrito.Vatsvagiri vakaona kuti iyo Al yemukati meiyi GaN/AlGaN goko yakadzikira zvishoma nezvishoma kubva kudivi rejekiseni remagetsi re nanowires kuenda kudivi rejekiseni regomba.Nekuda kwemusiyano muminda yemukati polarization yeGaN neAlN, vhoriyamu gradient yeAl yemukati muAlGaN layer inoburitsa maerekitironi emahara, ayo ari nyore kuyerera achipinda mukati meMQW core uye kuderedza kusagadzikana kwemavara nekudzikisa nzvimbo yepolarization.
Muchokwadi, vaongorori vakawana kuti pamidziyo isingasviki kironi imwe padhayamita, iyo peak wavelength ye electroluminescence, kana ikozvino-induced light emission, inoramba iripo pahurongwa hwehukuru hwekuchinja kwejekiseni razvino.Pamusoro pezvo, timu yaProfessor Mi yakambogadzira nzira yekukura emhando yepamusoro yeGaN coatings pasilicon yekukura nanowire leds pasilicon.Saka, µled inogara paSi substrate yakagadzirira kubatanidzwa nemamwe magetsi eCMOS.
Iyi µled zviri nyore ine akawanda angangoita maapplication.Iyo puratifomu yemudziyo ichawedzera kusimba sezvo emission wavelength yeRGB yakasanganiswa inoratidzwa pane chip ichiwedzera kusvika kutsvuku.
Nguva yekutumira: Jan-10-2023